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FPA-3030EX6
概要（Overview）
The performance of previous model FPA-3000EX6 steppers was inherited, and the highest-level of resolution (150 nm), overlay accuracy (25 nm) and productivity (throughput *121 wph) were achieved among KrF excimer laser steppers in the same class. *200 mm (8 inch) wafer, 60 shots
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