メインコンテンツにスキップ
6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
Moov logo

6" Fab For Sale from Moov - Click Here to Learn More
Moov Icon
CANON FPA-3030i5a
    説明
    i-Line Stepper
    構成
    Configuration: - Projection Lens (NA0.45 to 0.63) - Exposure field:(22mm × 22mm to 17×26mm) - Resolution: <350nm - Distortion: <35nm - D-scope (Alignment precision: <40nm) - 6inch reticle changer (for Canon standard reticle cassette) - 200mm(8inch) standard wafer handling kit - Chuck maintenance unit - Pellicle particle checker (stand off 6.3mm) - Signal tower (3 colors) - Left inline kit for TEL ACT8 - CE mark Option: - 200mm special wafer handling kit* *For thickness range 1200 - 1700um with SEMI standard Notch, and +/-100um warpage. Includes special chuck & 3pins and special wafer transfer system. - Additional reticle library (for canon standard reticle cassette) - Reticle barcode reader Software: - Recipe Server - GEM Online (Canon standard specifications) - Spiral PA function, TVPATDI (Rotation range up to 90,000ppm) - Recipe server additional functions *ARC/RDM function, Die layout, X,Y coordinate & auto recipe upload function. - Focus Z figure resetting function for FPA-3030i5a
    OEMモデルの説明
    The FPA-3030i5a can be equipped with a handling system that enables the selection of wafer diameters from 50mm (2inch) to 200mm (8inch) to support a variety of different compound semiconductor wafer sizes and materials.
    ドキュメント

    ドキュメントなし

    CANON

    FPA-3030i5a

    verified-listing-icon

    検証済み

    カテゴリ
    Steppers & Scanners

    最終検証: 19日前

    主なアイテムの詳細

    状態:

    Used


    稼働ステータス:

    不明


    製品ID:

    116235


    ウェーハサイズ:

    8"/200mm


    ヴィンテージ:

    不明


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    同様のリスト
    すべて表示
    CANON FPA-3030i5a

    CANON

    FPA-3030i5a

    Steppers & Scanners
    ヴィンテージ: 0状態: 中古
    最終確認19日前

    CANON

    FPA-3030i5a

    verified-listing-icon
    検証済み
    カテゴリ
    Steppers & Scanners
    最終検証: 19日前
    listing-photo-9d183669683648869800f3425bb9dce4-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1372/9d183669683648869800f3425bb9dce4/70cfc1ed90684e7598632bc678d67229_c95a957c192b48f6a56e76809dab847945005c_mw.jpeg
    主なアイテムの詳細

    状態:

    Used


    稼働ステータス:

    不明


    製品ID:

    116235


    ウェーハサイズ:

    8"/200mm


    ヴィンテージ:

    不明


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    説明
    i-Line Stepper
    構成
    Configuration: - Projection Lens (NA0.45 to 0.63) - Exposure field:(22mm × 22mm to 17×26mm) - Resolution: <350nm - Distortion: <35nm - D-scope (Alignment precision: <40nm) - 6inch reticle changer (for Canon standard reticle cassette) - 200mm(8inch) standard wafer handling kit - Chuck maintenance unit - Pellicle particle checker (stand off 6.3mm) - Signal tower (3 colors) - Left inline kit for TEL ACT8 - CE mark Option: - 200mm special wafer handling kit* *For thickness range 1200 - 1700um with SEMI standard Notch, and +/-100um warpage. Includes special chuck & 3pins and special wafer transfer system. - Additional reticle library (for canon standard reticle cassette) - Reticle barcode reader Software: - Recipe Server - GEM Online (Canon standard specifications) - Spiral PA function, TVPATDI (Rotation range up to 90,000ppm) - Recipe server additional functions *ARC/RDM function, Die layout, X,Y coordinate & auto recipe upload function. - Focus Z figure resetting function for FPA-3030i5a
    OEMモデルの説明
    The FPA-3030i5a can be equipped with a handling system that enables the selection of wafer diameters from 50mm (2inch) to 200mm (8inch) to support a variety of different compound semiconductor wafer sizes and materials.
    ドキュメント

    ドキュメントなし

    同様のリスト
    すべて表示
    CANON FPA-3030i5a

    CANON

    FPA-3030i5a

    Steppers & Scannersヴィンテージ: 0状態: 中古最終検証:19日前
    CANON FPA-3030i5a

    CANON

    FPA-3030i5a

    Steppers & Scannersヴィンテージ: 0状態: 中古最終検証:19日前
    CANON FPA-3030i5a

    CANON

    FPA-3030i5a

    Steppers & Scannersヴィンテージ: 0状態: 中古最終検証:19日前