概要（Overview）

LIBRA® 120 combines an improved 120kV column together with the well proven elements of the versatile In-column OMEGA filter, the patented Koehler illumination system, and the digitally controlled electron optics. These elements combined with new, completely redeveloped electronics and the innovative Graphical User Interface (GUI) makes 120 an outstanding EFTEM for better results in imaging, element analysis, low dose, and remote controlled 3D experiments.