"The Denton Vacuum Integrity system is configured for demanding optical, semiconductor and compound semiconductor applications. This solution offers high yield, stress control, high deposition rate, PID control, optimal grain size and film crystallography. Denton offers application-specific tools pre-configured to meet demanding process requirements."

DENTON VACUUM

INTEGRITY

The system is a thermal evaporator.  It can use either a filament (such as chrome), or pellets (such as gold) in a boat (typically made of Tungsten) as the evaporation source.  

The carousel-type system is called a dome.  We have a dome with the evaporator for holding multiple substrates.  It is also fairly simple to custom order a dome.

The dome we have can accommodate 7 substrates (3'' in diameter).  We have also made custom plates to accommodate 7 substrates of 2'' x 3'' size.  

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INTEGRITY

カテゴリ

概要（Overview）

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