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IRIS C1
概要（Overview）
The Iris C1 system combines a proprietary spectroscopic ellipsometry solution from the Atlas family with Onto Innovation’s industry leading AI-Diffract OCD analysis software, enabling high precision control of every critical semiconductor process step. The system incorporates a dual-arm robot, high-precision stage and high-speed focus system. The system also features advanced pattern recognition, improved thickness reproducibility and throughput.
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