概要（Overview）

The NanoSpec 8000 is a fully automated film thickness measurement system introduced by Nanometrics. It is designed to meet the speed, measurement, performance, and reliability requirements essential to high-level factory control in today’s semiconductor mega-fabs and magnetic head production. The system can be programmed to run operator-free and offers a wide range of film thickness measurements for 75 mm to 200 mm wafers. Additionally, it boasts a low cost of ownership.