概要（Overview）

The NanoSpec 9200 is an advanced film analysis system that provides DUV-visible spectroscopic reflectometry. It has a small footprint and high throughput, making it a highly efficient tool for analyzing film thickness and material optical constants. The system can handle both 150mm and 200mm wafers and is capable of measuring up to 200 wafers per hour. It features the latest generation spectroscopic reflectometer, pattern recognition, auto-focus, auto-positioning stage, and robotic wafer handling capabilities. This makes it a fast, reliable, compact, and cost-effective tool for volume production in the IC manufacturing industry.