概要（Overview）

The Filmetrics F50 is an automated thin-film thickness mapping system equipped with a motorized r-theta stage that moves automatically to selected measurement points and provides thickness measurements as fast as two points per second. The system is capable of mapping wafers using predefined polar, rectangular or linear map patterns with center or edge exclusion. The F50 film thickness mapping system connects to the USB port of your Windows® computer and can be set up in minutes.