説明
説明なし構成
-Software Version: 2.04c -CIM: SECS -Process: Film thickness measurement System Type Description Quantity Status Factory Interface SMIF 2 OK Handler System Robot 1 OK Options System Server 1 OK Main System Main body 1 OKOEMモデルの説明
The Opti-Probe 3260 (OP-3260) is a metrology tool developed by Therma-Wave that offers a 30% increase in productivity. It has the same thick and thin film measurement capabilities as the original Opti-Probe, making it the only choice for measuring TiN t, n, and k in the UV range down to 190nm. The OP-3260 also features better robotics, Pentium-speed processing, a spectrometric light source that can be changed in 15 minutes without optics recalibration, and the surest pattern recognition in the business. These improvements result in a significant jump in productivity, making it easier to turn out more wafers.ドキュメント
ドキュメントなし
KLA / THERMA-WAVE
OP-3260
検証済み
カテゴリ
Thin Film / Film Thickness
最終検証： 10日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
118007
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / THERMA-WAVE
OP-3260
カテゴリ
Thin Film / Film Thickness
最終検証： 10日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
118007
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
-Software Version: 2.04c -CIM: SECS -Process: Film thickness measurement System Type Description Quantity Status Factory Interface SMIF 2 OK Handler System Robot 1 OK Options System Server 1 OK Main System Main body 1 OKOEMモデルの説明
The Opti-Probe 3260 (OP-3260) is a metrology tool developed by Therma-Wave that offers a 30% increase in productivity. It has the same thick and thin film measurement capabilities as the original Opti-Probe, making it the only choice for measuring TiN t, n, and k in the UV range down to 190nm. The OP-3260 also features better robotics, Pentium-speed processing, a spectrometric light source that can be changed in 15 minutes without optics recalibration, and the surest pattern recognition in the business. These improvements result in a significant jump in productivity, making it easier to turn out more wafers.ドキュメント
ドキュメントなし