概要（Overview）

The OP-5220 is part of the Opti-Probe Thin and Thick Film Measurement System, specifically the OP-5200 Series. This series integrates up to five measurement technologies, including BPR (Back Pressure Regulator), BPE (Bipolar Electrode), DUV (Deep Ultraviolet) reflectance, Spectroscopic Ellipsometry, and AE (Absolute Ellipsometry). This integration allows for comprehensive and accurate measurement of various physical properties of thin and thick films.