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説明
Stress Measurement構成
構成なしOEMモデルの説明
The Tencor FLX-5400 is an automated wafer handling system that uses patented dual wavelength technology to create 2D and 3D maps of radial stress. It has a unique calibration algorithm and automatic substrate thickness determination for enhanced measurement accuracy.ドキュメント
ドキュメントなし
KLA
FLX 5400
カテゴリ
Thin Film / Film Thickness
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
122878
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
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説明
Stress Measurement構成
構成なしOEMモデルの説明
The Tencor FLX-5400 is an automated wafer handling system that uses patented dual wavelength technology to create 2D and 3D maps of radial stress. It has a unique calibration algorithm and automatic substrate thickness determination for enhanced measurement accuracy.ドキュメント
ドキュメントなし