概要（Overview）

The Veeco DLC-X system is a state-of-the-art tool for depositing thin, durable diamond-like carbon films, ideal for TFMH slider overcoats and landing pads. It features the industry's first production-worthy Pulsed Filtered Cathode Arc Source, enabling ultra-thin overcoats with exceptional uniformity and repeatability. This system combines long throw, low pressure PVD for dense, pin-hole free layers, a reactive PVD capability, and a tunable low-energy ion beam etch source for precise material removal. Additionally, its integrated tilting ellipsometer ensures accurate end point control in etch and deposition processes.