INFICON

IC 6000

The MDC-360C can measure and average up to six crystals at one time to reduce measurement errors in large area deposition. Its high measurement resolution and fast update rate provide precise rate control down to 0.1 Ang/ sec. It also has a Rate Establish function to obtain rate control before opening the source shutter as well as multiple rate ramps to handle the most critical processes.

INFICON / MAXTEK

MDC-360C

KURT J LESKER

PVD 200

Technology: Plasma-assisted reactive magnetron -sputtering (PARMS/ PARMS+)
Applications: MF sputtering (optional: RF, DC sputtering) MF sputtering
Coating material: SiO2, Al2O3, Nb2O5, Ta2O5, HfO2, ZrO2, HfO2, Si3N4, ITO, Al, Ag, SiH
Capacity: 12* pcs. at Ø 200 mm / 8”

Thin Flim

概要（Overview）

サービス

Thin Flim のメーカー

Thin Flim のトップ製品

IC 6000

MDC-360C

PVD 200

HELIOS 800