Mirra Mesa.pdf

APPLIED MATERIALS (AMAT) MIRRA MESA.mov

Applied Materials is committed to accelerating this new PPACt playbook for our customers and partners. We have the broadest and deepest portfolio of products for delivering PPACt innovations to the market. This portfolio encompasses the ability to create and deposit, shape and remove, modify, analyze, and connect materials and devices in new ways. We are unique in having a broad suite of process technology and metrology capabilities under one roof, and we have highly differentiated silicon and packaging lab capabilities. Our Integrated Materials Solutions co-optimize materials deposition, removal, modification, and analysis to create new materials and engineer new structures for high-performance, low-power chips at leading-edge nodes.

APPLIED MATERIALS (AMAT)

The Applied Mirra Mesa CMP system delivers industry-leading 200mm production CMP for 0.13-micron and below devices. Proven for oxide, shallow trench isolation (STI), polysilicon, tungsten and copper applications: the Applied Mirra Mesa system delivers both excellent process performance and the smallest footprint for the highest output per square foot. Its 3-platen, 4-head architecture coupled with in situ endpoint detection capability provides process flexibility and reliability. The system's integrated Mesa cleaner uses unique single-wafer megasonic cleaning technology and double-sided brush scrubbing to control corrosion and remove particles and slurry residue from both sides of the wafer (including very small recessed features and difficult bevel regions).

Based on the Titan Head system (which has the largest production installed base in the industry), the new Titan Profiler polishing head allows advanced polishing profile control by precisely controlling polishing pressure independently in several zones across the wafer. Its ability to tune the film removal rate to match specific wafer characteristics with slurry chemistries provides superior control over dishing and erosion. This unique capability significantly increases precision in applications that may have variable incoming film thickness, such as polishing electroplated dual damascene copper layers.

Superior process control is provided by the system's FullScan endpoint technology which enables users to scan the entire wafer to precisely control overpolishing, contributing to higher yields and excellent results on copper-based chips. This capability minimizes dishing and erosion of copper wiring structures, creating the flat surface topography needed to create multiple layers of interconnects. iScan process monitoring and control system is a real-time inline copper thickness monitor, which compensates for incoming profile and thickness non-uniformity and wafer-to-wafer removal rate variations, while maximizing tool throughput. The Applied Mirra Mesa system's copper process technology also has been integrated to work with Applied Endura Electra Cu Barrier/Seed and Applied Electra Cu ECP systems to provide a fully characterized, seamless process flow.

MIRRA MESA

AAA9EC4F-33C6-47BA-8244-B5C5866CB56C_1_201_a.jpeg

FE2EB6D7-E988-4325-8345-9856AEEBA18A.jpeg

182F31EF-C954-49A2-A523-3A5CB86A3244_1_201_a.jpeg

92ACF5B3-3899-4732-BE0E-1F1F2720E8AB.jpeg

7002EFE3-BF37-405C-87C5-FC12866FA4B8_1_201_a.jpeg

FF955B18-CF2B-4387-9D22-E6C43C27CFAF_1_201_a.jpeg

769EED1D-5319-41A9-881A-06775EFA08A6.jpeg

C8FE1DA8-32FF-447A-A836-093C15C48C14_1_201_a.jpeg

6ECFA6CC-41E7-43D3-BDD9-9D94FF470F4D_1_201_a.jpeg

6A80BC6B-96CD-4197-A19B-32DEDDAA3F89_1_201_a.jpeg

016F9E36-1B56-4EE6-9DF6-10CDEE7B26C5.jpeg

9290C35B-5FF6-40E3-8455-1A20B81F30F7.jpeg

9D3C43E0-27D7-423B-B824-B6E1E9AF1A1B_1_201_a.jpeg

6F4A8A73-D59A-440F-A814-1FA3B2565D7A_1_201_a.jpeg

13D143F2-F7E6-479C-9B15-AC05010E973F_1_201_a.jpeg

C248BBE4-BD61-4716-B304-D4408F425BA7_1_201_a.jpeg

6B5782A8-D042-4907-AE88-D064B701F3CC_1_201_a.jpeg

F2F2B97D-1052-400E-B141-A84DD126E0B2_1_201_a.jpeg

8E9B6D8A-F7E0-477E-890B-898F510E9DEF_1_201_a.jpeg

E5E7C2DC-3A52-49E3-ABC5-2300A286CFF4_1_201_a.jpeg

17AFF911-926B-48EE-990D-3526236F209B.jpeg

B2EF03C3-356C-4971-8D90-17018CF421DD.jpeg

0025B81C-3F35-4629-81BF-B0D0366A274D.jpeg

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

APPLIED MATERIALS (AMAT)

MIRRA MESA

CMP

同様のリスト

APPLIED MATERIALS (AMAT)

MIRRA MESA

APPLIED MATERIALS (AMAT)

MIRRA MESA

APPLIED MATERIALS (AMAT)

MIRRA MESA

APPLIED MATERIALS (AMAT)

MIRRA MESA

APPLIED MATERIALS (AMAT)

MIRRA MESA

APPLIED MATERIALS (AMAT)

MIRRA MESA

APPLIED MATERIALS (AMAT)

MIRRA MESA

MIRRA MESA

CMP

同様のリスト

APPLIED MATERIALS (AMAT)

MIRRA MESA

APPLIED MATERIALS (AMAT)

MIRRA MESA

APPLIED MATERIALS (AMAT)

MIRRA MESA

APPLIED MATERIALS (AMAT)

MIRRA MESA

APPLIED MATERIALS (AMAT)

MIRRA MESA

APPLIED MATERIALS (AMAT)

MIRRA MESA

APPLIED MATERIALS (AMAT)

MIRRA MESA