DAS8920
カテゴリ
CMP概要（Overview）
The DAS8920 is a semi-automatic surface planer for Φ8-inch wafers (Φ200 mm) with 1 axis and 1 chuck table. It uses ultrahigh-precision planarization technology with a diamond bit to provide solutions for high-precision planarization of ductile materials such as metals, resins, and their composites as well as solutions for reducing bump height variation and surface roughness.
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