EBARA FREX 200 is a CMP system which is used for wafer grinding, lapping, and polishing. The FREX 200 is compatible with 200mm wafer size.

EBARA

F-REX200

Missing Parts 
  - Key components
 Robot D, L, R each Controller 3ea
 Platen Rotation Mity Server (L,R)
 Topring Head(L,R)
  - Other parts
 Torping Swing Driver(L,R)
 Dresser Swing Driver(L,R)
 Slurry flow controller needs refurbishment(NT6500→Malema)(L,R)
 MABP Regulator(R)
 Topring Rotary Union(R)

Missing Parts 
  - Key components
 Robot R (Cleaner robot)
 Platen Rotation Mity Server (L,R)
 Dresser Rotarion Mity Server(R)
 Topring Rotation Mity Server(R)
 Topring Head(L,R)
 Topring Rotary Union(R)
  - Other parts
 Dresser Swing Driver(L,R)
 Torping Swing Driver(R)
 Topring Valve Manifold(L)
 Topring PCP, CABP Regulator(R)
 Polisher Buffing Unit(L,R)
 Slurry flow controller needs refurbishment(NT6500→Malema)(L,R)
 AI/O Converter(L)

F-REX200

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