VERSAPORT 2200
カテゴリ
Wafer Handling概要（Overview）
The ASYST VERSAPORT 2200 is a 200mm class load port system designed to present wafers on reticles to the process tool in a controlled environment, ensuring a cleanroom environment better than Class 1 standards for the substrate. It facilitates the smooth and contamination-free transfer of wafers, enhancing the overall efficiency and reliability of the semiconductor manufacturing process.
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