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Remote Pre-Aligner
カテゴリ
Wafer Handling概要（Overview）
The Remote Pre-Aligner (RPA) is an intelligent robot add-on, providing accurate and non-contact measurement of the eccentricity and the orientation of substrate placement. It is designed to be seamlessly integrated with Gencobot series 4, 7, 8, and GPR-SM when substrate alignment is required by the material handling application.
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サービス
検査、保証、鑑定、ロジスティクス
