H-SQUARE

LCT1AS6

AVT6

SMIFPO8

QBL 150

Tabletop, automatic high-value, thin wafer, compound wafer transfer tool. Wafers are gently bulk-lifted midpoint in the cassette slots before being extracted or loaded. This is to minimize contact with the cassette, eliminating chances of particulation or wafer edge chipping. High reliability and low maintenance. Small footprint saves valuable cleanroom space. Designed for ISO Class 3 (FS209E Class 1), Antistatic construction.

The LCT2 Features: 
- Touchscreen control
- PVDF coated rods transfer 25 wafers at one time
- Door present detection
- Wafer detection in cassette and in tool

LCT2

Standalone, automatic, single-wafer transfer and wafer mover. 300mm Wafer Sorter with the mapping end effector. An automated, stand-alone transfer tool. The cost-effective tool to reduce wafer breakage and scratches caused by manual wafer handling. This simple sorter is compatible with all SEMI compliant FOUP, FOSB, and metal cassettes. Wafers are gently lifted from cassette slots before being extracted or loaded. This reduces contact with the cassette, minimizing particle generation and wafer edge chipping. Designed for ISO Class 5 (FS209E Class 10).

WS300 Features:
- Touchscreen control
- 350 wafers per hour
- Gravity End Effector with peek pads and snubber.
- Wafer mapping checks for wafer presence, cross-slot, double stack
- Combining wafers into one cassette *Multiple Recipe Modes
- Antistatic construction

WS300

WP6-AC

LCTAS12UK

RSP150

H-SQUARE

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トップH-SQUARE Wafer Handling

LCT1AS6

AVT6

SMIFPO8

QBL 150

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すべてのH-SQUARE Wafer Handling