概要（Overview）

150mm silicon wafer polisher with template process Up to 6" wafer polishing capabilities, including silicon, quartz, LiNi, Sapphire, Silicon carbide, Germanium …. Lowest Cost of Ownership with high production throughput and low maintenance requirements State-of-the-art touch screen recipe control PC Three-way valve slurry recovery Wax mount conversion kit Network capabilities SECS/GEM