SS-80BW
カテゴリ
Wafer Scrubber概要（Overview）
The DNS/ Dainppon SS80-BW is an wet station system. The DNS / Dainppon can be used with 8” wafer sizes and the scrubber size is also 8”. It has a 4-color GYWR petite type single tower and 4 type indexer unit. The spin unit on the front side is black acetal and the backside has a brush nozzle.
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