説明
Condition: Complete / Working Status: Installed in the fab構成
構成なしOEMモデルの説明
Introduced to the market during fiscal 2002, the Sirius was designed specifically to deliver HydrOzone process. HydrOzone, using a minimal amount of deionized water and ozone is a low cost process option in comparison to the typical processes used for photoresist stripping, photolithography rework and organic cleans. The Sirius is a manually loaded semi-automated system with a 50 wafer capacity spray processing chamber. The system is available to accommodate either 200mm or 300mm wafer sizes.ドキュメント
ドキュメントなし
SEMITOOL
SIRIUS
検証済み
カテゴリ
Wet Benches - Manual
最終検証: 12日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
106396
ウェーハサイズ:
不明
ヴィンテージ:
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SEMITOOL
SIRIUS
カテゴリ
Wet Benches - Manual
最終検証: 12日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
106396
ウェーハサイズ:
不明
ヴィンテージ:
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Condition: Complete / Working Status: Installed in the fab構成
構成なしOEMモデルの説明
Introduced to the market during fiscal 2002, the Sirius was designed specifically to deliver HydrOzone process. HydrOzone, using a minimal amount of deionized water and ozone is a low cost process option in comparison to the typical processes used for photoresist stripping, photolithography rework and organic cleans. The Sirius is a manually loaded semi-automated system with a 50 wafer capacity spray processing chamber. The system is available to accommodate either 200mm or 300mm wafer sizes.ドキュメント
ドキュメントなし