Single wafer cleaner. 
Process performance:  
High grade process (19nm particle removal). 
Defect free technology.

Productivity / Hardware:
Contamination free clean by NIC bowl.
SF-aerosol : High velocity/uniformity droplet.
Smart system : APAC (Auto Flow Control). 
AIS (Auto Inspection System).
SEAS (Smart Equipment Analysis System).

Semes have achieved growth centering on cleaning, etching, and photo-track equipment used in the semiconductor manufacturing process. Also, the advancement has been shown in such sectors as test & package, semiconductor logistics automation equipment, and display OLED.

BLUEICE PRIME

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