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VERANO-5000
カテゴリ
ALD概要（Overview）
Verano-5000 is a batch Atomic Layer Deposition (ALD) system developed by Aviza. It is designed to process 300mm wafers and meet the requirements of nano-scale processing and high productivity beyond the 90-nanometer node. The system can process 50 wafers at a time, achieving a relatively low cost of ownership without compromising on uniformity and step coverage.
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