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説明
No warranty Spares Ethanol tank- 1 Trap tank - 1 RF Generator ENI - OEM 1250- 1 Transfer Module/Process Module Computer- 1 CTC Computer- 1 Brooks Power Supply- 1 Bay Voltex HREHT-0650-DC-G- 1構成
Process- MOCVD Ta(OC2H5)5 Operating System- Windows XP Professional Platform Model- Brooks MX700 Process Module- 2 Wafer Transfer Robot- Brooks MagnaTran™ 7.1 Transfer Robot Arm- Leap Frog GEM/SECS Interface- HSMS Heat Exchanger- Bay Voltex HREHT-0650-DC-G RF Generator- ENI - OEM 1250 Vaccum Load Lock- Brooks VCE 6 Vacuum Cassette Elevator SMIF- ASYST SMIF LPI 2200 Vacuum Pump - Process pump - Ebara EVM202NBE LDS pump - EVS100P Load lock pump - Kashiyama TS310X Transfer Module pump - Kashiyama TS310X GRC- Edward D150 Dual Gas Reactor Column LDS System- Y Fire Distinguisher System- Y MFC Argon (Horiba)- 300SCCM Argon (Horiba)- 5000SCCM Argon (Horiba)- 1000SCCM O2 (Horiba)- 500SCCM SF6 (UNIT)- 500SCCM LFM - (OC2H5)5 (Horiba)- 0.1g/minOEMモデルの説明
提供なしドキュメント
カテゴリ
ALD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
113491
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
JUSUNG
EUREKA 2000
カテゴリ
ALD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
113491
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available