説明
説明なし構成
details attached. -the endcap drive gear motors should be replaced - Following gases connected: H2, NH3, O2, Ar, N2, TMA (Trimethylaluminum) was our aluminum source. We deposited only Al2O3 in this system - Substrate holder: (240mm) resistance-heated (up to 400C) - Remote Plasma source: 300W capacity at 13.56MHz (RF generator and automatic matching unit included) - Metal Precursors delivery: (2) Bubbler and (2) vapor drawn - Gas lines: Non-toxic gas lines (3 lines) and toxic gas lines (2 lines). Each gas line is equipped with its individual MFC. - Water delivery kit included - Ozone generator included. - Vacuum gauges: 1000mT CM gauge + Penning - Pumps: dry pump with precursor foreline trap fitted - Pumping pipe work: 40mm (heating kit included)OEMモデルの説明
提供なしドキュメント
OXFORD
Opal-PEALD
検証済み
カテゴリ
ALD
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
49566
ウェーハサイズ：
不明
ヴィンテージ：
2015
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
OXFORD
Opal-PEALD
検証済み
カテゴリ
ALD
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
49566
ウェーハサイズ：
不明
ヴィンテージ：
2015
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available