
説明
KLA Altair 8920i AOI Tool KLA Altair 8920i Wafer Frontside Automatic Optical Inspection Tool Combines Brightfield & Darkfield Defect Detection with Flexible LED Illumination Fastest Available Excursion Monitoring Capability for >0.2 um Defects Phoenix 3.0 EFEM with 3ea Loadports for 6” & 8” Wafers High Performance Inspection Objectives: 2X, 3.5X, 5X, 10X High Performance Review Objective: 35X Low Warpage Chuck for 6” & 8” Wafers Multi-Region Based Thresholding Advanced Detection Algorithms Automated Review Sampling Brightfield Review Mode Litho Bevel Centricity Autofocus Capability Rules Based Binning構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし
検証済み
カテゴリ
AOI
最終検証: 8日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
153745
ウェーハサイズ:
不明
ヴィンテージ:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
Altair 8920i
カテゴリ
AOI
最終検証: 8日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
153745
ウェーハサイズ:
不明
ヴィンテージ:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
KLA Altair 8920i AOI Tool KLA Altair 8920i Wafer Frontside Automatic Optical Inspection Tool Combines Brightfield & Darkfield Defect Detection with Flexible LED Illumination Fastest Available Excursion Monitoring Capability for >0.2 um Defects Phoenix 3.0 EFEM with 3ea Loadports for 6” & 8” Wafers High Performance Inspection Objectives: 2X, 3.5X, 5X, 10X High Performance Review Objective: 35X Low Warpage Chuck for 6” & 8” Wafers Multi-Region Based Thresholding Advanced Detection Algorithms Automated Review Sampling Brightfield Review Mode Litho Bevel Centricity Autofocus Capability Rules Based Binning構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし