ASM is a supplier of semiconductor process equipment for wafer processing, including lithography, deposition, ion implant and single-wafer epitaxy. ASM is part of the ASM International NV group that also includes ASM Pacific Technology (ASMPT). ASMPT, in which ASMI holds a substantial ownership is a leading supplier of semiconductor process equipment for wafer assembly and packaging, and for surface mount technology.



VORTEX

Main and auxiliary equipment:  Master Device
Maximum substrate size (mm):  270*210	
Power consumption:  220V 50/60Hz 1050W	
Gas output:  6Bar	
Machine width (cm): 138	
Machine depth (cm): 120	
Machine height (cm): 141	
Machine height (cm) including three-color light: 191	
Machine weight (Kg/cm 2): 1050	

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Main and auxiliary equipment:  Master Device
Maximum substrate size (mm):  270*210	
Power consumption:  220V 50/60Hz 1050W	
Gas output:  6Bar	
Machine width (cm): 138	
Machine depth (cm): 120	
Machine height (cm): 141	
Machine height (cm) including three-color light: 191	
Machine weight (Kg/cm 2): 1050	


Main and auxiliary equipment:  Master Device
Maximum substrate size (mm):  270*210	
Power consumption:  220V 50/60Hz 1050W	
Gas output:  6Bar	
Machine width (cm): 138
Machine depth (cm): 120	
Machine height (cm): 141	
Machine height (cm) including three-color light: 191	
Machine weight (Kg/cm 2): 1050	


Main and auxiliary equipment:  Master Device
Maximum substrate size (mm):  270*210	
Power consumption:  220V 50/60Hz 1050W	
Gas output:  6Bar	
Machine width (cm): 138	
Machine depth (cm): 120	
Machine height (cm): 141	
Machine height (cm) including three-color light: 191	
Machine weight (Kg/cm 2): 1050

Main and auxiliary equipment:  Master Device
Maximum substrate size (mm):  270*210	
Power consumption:  220V 50/60Hz 1050W	
Gas output:  6Bar	
Machine width (cm): 138
Machine depth (cm): 117.9	
Machine height (cm): 140	
Machine height (cm) including three-color light: 191	
Machine weight (Kg/cm 2): 1050	



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