説明
Missing parts: Tanks N2 heaters Monitor Fluidic fittings Cabinet Panels構成
- Spray Acid Tool (SAT) - measurement of the chamber opening = approximately 20” - Single Chamber - Up to 12"/300mm capable - Capacity: Single 25-Wafer Cassette, 300mm wafers - 2 Heated Chemical Tank - 1 Pneumatic Trebor Pump for chemical delivery - 3 Fill Vessel - 3 AO Metering Pump - Ozone Catalyst Destruct Unit - Ozone Injection (Ozone Ready) but Ozone the generator not included - Touch Screen Interface - Emergency Off (EMO) - Light Tower - System Power: 208V, 3PH, 40Amp, 50/60Hz - Operator Manuals and documentationOEMモデルの説明
The Spray Acid Tool (SAT) is a versatile tool that offers a range of cleaning, etching, and stripping capabilities. It features a multichamber design that allows for safe and economical operation in a completely closed environment. The SAT is 300mm ready, meaning it can handle wafers of that size. Some of the specific applications of the SAT include post-CMP clean, photo-resist strip, polymer removal, pre-diffusion clean, monitor wafer clean, and metal etch. These processes are essential for the preparation and maintenance of semiconductor wafers during the manufacturing process.ドキュメント
ドキュメントなし
SEMITOOL
SAT
検証済み
カテゴリ
Wet processing
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
58652
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
SEMITOOL
SAT
検証済み
カテゴリ
Wet processing
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
58652
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Missing parts: Tanks N2 heaters Monitor Fluidic fittings Cabinet Panels構成
- Spray Acid Tool (SAT) - measurement of the chamber opening = approximately 20” - Single Chamber - Up to 12"/300mm capable - Capacity: Single 25-Wafer Cassette, 300mm wafers - 2 Heated Chemical Tank - 1 Pneumatic Trebor Pump for chemical delivery - 3 Fill Vessel - 3 AO Metering Pump - Ozone Catalyst Destruct Unit - Ozone Injection (Ozone Ready) but Ozone the generator not included - Touch Screen Interface - Emergency Off (EMO) - Light Tower - System Power: 208V, 3PH, 40Amp, 50/60Hz - Operator Manuals and documentationOEMモデルの説明
The Spray Acid Tool (SAT) is a versatile tool that offers a range of cleaning, etching, and stripping capabilities. It features a multichamber design that allows for safe and economical operation in a completely closed environment. The SAT is 300mm ready, meaning it can handle wafers of that size. Some of the specific applications of the SAT include post-CMP clean, photo-resist strip, polymer removal, pre-diffusion clean, monitor wafer clean, and metal etch. These processes are essential for the preparation and maintenance of semiconductor wafers during the manufacturing process.ドキュメント
ドキュメントなし