概要（Overview）

VeraSEM™ is a metrology-SEM system that is the first of its kind in the industry. It extends the capabilities of a conventional CD-SEM system beyond just critical dimensional (CD) measurement, allowing for the monitoring of a variety of challenging process parameters. This means that VeraSEM™ provides a more comprehensive and versatile solution for process monitoring, making it a valuable tool for industries that require precise and accurate measurements.