説明
Working condition構成
Model : CG 4000 Condition : Initialize tested, Option : Dry Pump Futures and configurations Wafer size : 300mm, "V" notch type Number of Cassette : TAS-300-E4, 2 port Foup type Robot type : Tazmo robot Mini environment Load lock : 2 Port load lock chamber Stage : Moving renge X=0 to 360, Y= -5 to 300mm by stepping motor Stage position : Laser doppler effect type Image Resolution : 1.8nm(at 800V) Accelerating voltage : 300V to 1600V Electron optic system : Retarding + boosting method CD Measurement range : 50 nm ~ 2 um Measure repeatability : 1% or 0,3 nm Throughput : 30 wafer/hour, 20point/wafer OS version : Red Hat Linux SEM Version: Ver 31.01 or higher. EWS : HITACHI HFW-2000 FA-PC with LCD type monitor Chiller : ITACHI W5010T Dimension : Main body : 1200(W) x 2007(D) x 1900(H) Weight 2050Kg Display unit : 600(W) x 1496(D) x 1850(H) Weight 340Kg Mini environment :1200(W) x 1200(D) x 1850(H) Weight 730Kg Power unit : 535(W) x 1170(D) x 1800(H) Weight 380Kg Chiller : 400(W) x 450(D) x 660(H) Weight 50Kg Roughing pump 2set (Option) : 220(W) x 750(D) x 570(H) Weight 100Kg Requirements Power & Utility for Main body : AC 220V single phase 6KVA within (less then 100 Ohm) ground line N2 : 500~680kPa (connecting pipe out diameter 6mm) House Vacuum : -80 Pa (connecting pipe out diameter 8mm) PDA(Pressure Dry Air) : 600~880 kPa (connecting pipe out diameter 6mm) Requirements Power & Utility for Dry pump : PCW : 1~1.5 liter/min Pressure : 2~5 kg/cm3 x 2 set for Dry pump N2 : 500~680kPa (connecting pipe out diameter 6mm) 2 set Exhaust : Normal heat exhaust NW 50 2 set VACUUM, Stage initialize, Gun HV condition --> Good Robot initialize completedOEMモデルの説明
The CG4000 is a cutting-edge solution for process applications, offering advanced functions that enhance both precision and efficiency. Its high-accuracy averaged CD (ACD) metrology function improves repeatability and throughput, while its industry-standard line edge roughness (LER) measurement function contributes significantly to process monitoring. These features make the CG4000 an essential tool for maintaining high standards in process applications.ドキュメント
HITACHI
CG4000
検証済み
カテゴリ
CD-SEM
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
107208
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2001
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
HITACHI
CG4000
カテゴリ
CD-SEM
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
107208
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2001
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available