説明
SEM - Critical Dimension (CD) Measurement構成
• * Ergonomics Modification • * 3 FOUP • * V35 Software • Signal Light Tower (with buzzer) • UL Safety Modification (S2-0200) • Circulator Input Voltage Modification • Automatic Beam Alignment on wafer • Optical magnification (x100 & x200) • AC208V input modification • Cable (15m) (for main unit thru power supply unit) • SE-Gun back-up power supply unit • Ion pump back-up power supply unit • SPM (pre-focus only) • Multi-point Measurement • Gap meas • Corner radius meas • Image Filing Function • Output function to DOS format FD • Recipe queue • ArF package (multi) • Image info additional function to MSR file • Waveform matching • Large pixel • Ax+B • Image enhancement • Mag. Max x400k • Dry Pump I/F "F" (for IL70) • GEM300 • DS/T-PC link connection license • 100nm Microscale • Grounded Arm • FFU hood • Flat Scan • N2 PurgeOEMモデルの説明
The CG4000 is a cutting-edge solution for process applications, offering advanced functions that enhance both precision and efficiency. Its high-accuracy averaged CD (ACD) metrology function improves repeatability and throughput, while its industry-standard line edge roughness (LER) measurement function contributes significantly to process monitoring. These features make the CG4000 an essential tool for maintaining high standards in process applications.ドキュメント
ドキュメントなし
HITACHI
CG4000
検証済み
カテゴリ
CD-SEM
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
83143
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
HITACHI
CG4000
検証済み
カテゴリ
CD-SEM
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
83143
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2009
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
SEM - Critical Dimension (CD) Measurement構成
• * Ergonomics Modification • * 3 FOUP • * V35 Software • Signal Light Tower (with buzzer) • UL Safety Modification (S2-0200) • Circulator Input Voltage Modification • Automatic Beam Alignment on wafer • Optical magnification (x100 & x200) • AC208V input modification • Cable (15m) (for main unit thru power supply unit) • SE-Gun back-up power supply unit • Ion pump back-up power supply unit • SPM (pre-focus only) • Multi-point Measurement • Gap meas • Corner radius meas • Image Filing Function • Output function to DOS format FD • Recipe queue • ArF package (multi) • Image info additional function to MSR file • Waveform matching • Large pixel • Ax+B • Image enhancement • Mag. Max x400k • Dry Pump I/F "F" (for IL70) • GEM300 • DS/T-PC link connection license • 100nm Microscale • Grounded Arm • FFU hood • Flat Scan • N2 PurgeOEMモデルの説明
The CG4000 is a cutting-edge solution for process applications, offering advanced functions that enhance both precision and efficiency. Its high-accuracy averaged CD (ACD) metrology function improves repeatability and throughput, while its industry-standard line edge roughness (LER) measurement function contributes significantly to process monitoring. These features make the CG4000 an essential tool for maintaining high standards in process applications.ドキュメント
ドキュメントなし