説明
Software Version: NA CIM: GEM Process: CD MEASUREMENT構成
CDSEM Hardware Configuration System Type Description Quantity Status Main System Main tool 1 OK Options System Optic system OK Others OK Factory Interface SMIF 2 OK Handler System Robot system 1 OKOEMモデルの説明
The Hitachi S-9220 CD-SEM is a high-resolution, automated tool for precise CD measurements. It is designed for inline process control and development in semiconductor manufacturing. With programmable addressing and pattern recognition, it accurately measures various structures. It supports 6-inch and 8-inch wafer loading and provides easy data access via Hitachi software and a Data Station. The S-9220 CD-SEM is an essential tool for semiconductor manufacturers, offering superior resolution and automation for reliable CD measurements.ドキュメント
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HITACHI
S-9220
カテゴリ
CD-SEM
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
133417
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2020
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available