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説明
In clean room in working condition. No missing parts. To be de-installed soon.構成
構成なしOEMモデルの説明
The Advanced CD Measurement SEM CG6300 (HITACHI CD-SEM) will offer higher resolution with a fully renewed electron optical system along with improved metrology repeatability and image quality. The electron microscope column is able to select secondary electrons and backscattered electrons emitted from the material depending on the measurement target. In this way, CD-SEM: CG6300 is able to measure the bottom dimensions of deep trenches and holes in via-in-trench*1 BEOL process*2 as well as 3D NAND and DRAM.ドキュメント
ドキュメントなし
HITACHI
CG6300
カテゴリ
CD-SEM
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
121201
ウェーハサイズ：
不明
ヴィンテージ：
不明
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説明
In clean room in working condition. No missing parts. To be de-installed soon.構成
構成なしOEMモデルの説明
The Advanced CD Measurement SEM CG6300 (HITACHI CD-SEM) will offer higher resolution with a fully renewed electron optical system along with improved metrology repeatability and image quality. The electron microscope column is able to select secondary electrons and backscattered electrons emitted from the material depending on the measurement target. In this way, CD-SEM: CG6300 is able to measure the bottom dimensions of deep trenches and holes in via-in-trench*1 BEOL process*2 as well as 3D NAND and DRAM.ドキュメント
ドキュメントなし