説明
Sedimentation tank (collection container), a DTU1531 (chiller unit), and two duct units for exhausting the process chambers!構成
DFS8960 1,400 (W) × 3,311.5 (D) × 1,870 (H) mm (2,194 mm (H) if the status indicator is included) Vacuum unit 500 (W) × 815 (D) × 670 (H) mm Water temperature control unit (DTU152) [Optional accessory] 450 (W) × 1,296 (D) × 1,235 (H) mmDFS8960 1,400 (W) × 3,311.5 (D) × 1,870 (H) mm (2,194 mm (H) if the status indicator is included) Vacuum unit 500 (W) × 815 (D) × 670 (H) mm Water temperature control unit (DTU152) [Optional accessory] 450 (W) × 1,296 (D) × 1,235 (H) mm DFS8960 Approx. 5,000 kg Vacuum unit Approx. 75 kg Water temperature control unit (DTU152) [Optional accessory] Approx. 310 kgOEMモデルの説明
2011 Developed the ultra high precision DFS8960 surface planer which supports 300 mm wafers. Fully-automatic surface planer for Φ300 mm wafers Φ300 mm 2 axes, 2 chuck tables Planarization Ultrahigh-precision planarization technology using a diamond bit The DISCO surface planer provides solutions for high-precision planarization of ductile materials such as metals, resins, and their composites as well as solutions for reducing bump height variation and surface roughness.ドキュメント
ドキュメントなし
DISCO
DFS8960
カテゴリ
CMP
最終検証： 13日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
125519
ウェーハサイズ：
8"/200mm, 12"/300mm
ヴィンテージ：
2014
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Sedimentation tank (collection container), a DTU1531 (chiller unit), and two duct units for exhausting the process chambers!構成
DFS8960 1,400 (W) × 3,311.5 (D) × 1,870 (H) mm (2,194 mm (H) if the status indicator is included) Vacuum unit 500 (W) × 815 (D) × 670 (H) mm Water temperature control unit (DTU152) [Optional accessory] 450 (W) × 1,296 (D) × 1,235 (H) mmDFS8960 1,400 (W) × 3,311.5 (D) × 1,870 (H) mm (2,194 mm (H) if the status indicator is included) Vacuum unit 500 (W) × 815 (D) × 670 (H) mm Water temperature control unit (DTU152) [Optional accessory] 450 (W) × 1,296 (D) × 1,235 (H) mm DFS8960 Approx. 5,000 kg Vacuum unit Approx. 75 kg Water temperature control unit (DTU152) [Optional accessory] Approx. 310 kgOEMモデルの説明
2011 Developed the ultra high precision DFS8960 surface planer which supports 300 mm wafers. Fully-automatic surface planer for Φ300 mm wafers Φ300 mm 2 axes, 2 chuck tables Planarization Ultrahigh-precision planarization technology using a diamond bit The DISCO surface planer provides solutions for high-precision planarization of ductile materials such as metals, resins, and their composites as well as solutions for reducing bump height variation and surface roughness.ドキュメント
ドキュメントなし