F-REX300
カテゴリ
CMP概要（Overview）
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.
現在の掲載品
13
サービス
検査、保証、鑑定、ロジスティクス
