説明
Only ever had silicon slurry and SC1 chemistry aboard構成
2xMPTI(5 CHAMBER) heads 2 extra/spare headsOEMモデルの説明
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.ドキュメント
ドキュメントなし
同様のリスト
すべて表示
EBARA
F-REX300
カテゴリ
CMP
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
127105
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Only ever had silicon slurry and SC1 chemistry aboard構成
2xMPTI(5 CHAMBER) heads 2 extra/spare headsOEMモデルの説明
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.ドキュメント
ドキュメントなし