説明
説明なし構成
Application: Oxide Polisher: 4 polish turn table Top Ring:AI head GII x4 Load/Unload port:3 Load ports Endpoint: TCM / Optical(S-OPM) Equipped on table B and D Slurry Delivery : Flow control valve With CLC Lines each table AMHS: OHT Operation panel: 3 Touch panels Cleaner module : 3 cleaner and 1 dryer stations Cleaner Type: Horizontal Type Dryer: Spin Rinse DrOEMモデルの説明
The Ebara FREX 300 S is a 300mm CMP system, featuring a four-head, four-platen design with a three-step clean process. It reliably meets 7nm tech requirements, providing development and production flexibility, and best-in-class reliability and cost of ownership.ドキュメント
ドキュメントなし
EBARA
F-REX300S
検証済み
カテゴリ
CMP
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
34636
ウェーハサイズ:
不明
ヴィンテージ:
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示EBARA
F-REX300S
検証済み
カテゴリ
CMP
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
34636
ウェーハサイズ:
不明
ヴィンテージ:
不明
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Application: Oxide Polisher: 4 polish turn table Top Ring:AI head GII x4 Load/Unload port:3 Load ports Endpoint: TCM / Optical(S-OPM) Equipped on table B and D Slurry Delivery : Flow control valve With CLC Lines each table AMHS: OHT Operation panel: 3 Touch panels Cleaner module : 3 cleaner and 1 dryer stations Cleaner Type: Horizontal Type Dryer: Spin Rinse DrOEMモデルの説明
The Ebara FREX 300 S is a 300mm CMP system, featuring a four-head, four-platen design with a three-step clean process. It reliably meets 7nm tech requirements, providing development and production flexibility, and best-in-class reliability and cost of ownership.ドキュメント
ドキュメントなし