説明
Still in use in cleanroom. Complete and operational.構成
-Automatic (batch) spin-coating and development – 100mm and 150mm wafers – 2 photoresist dispense lines + 2 syringe lines – 2 photoresist developer lines (spray or puddle) – Spray-coating option – Resists: AZ 1512 HS, AZ 10XT-60, LOR 5AOEMモデルの説明
Automated resist processing system providing high-throughput performance and supporting wafers up to 300 mm in diameterドキュメント
ドキュメントなし
EVGroup (EVG)
EVG150
検証済み
カテゴリ
Coaters & Developers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
96201
ウェーハサイズ：
4"/100mm
ヴィンテージ：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
EVGroup (EVG)
EVG150
カテゴリ
Coaters & Developers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
96201
ウェーハサイズ：
4"/100mm
ヴィンテージ：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Still in use in cleanroom. Complete and operational.構成
-Automatic (batch) spin-coating and development – 100mm and 150mm wafers – 2 photoresist dispense lines + 2 syringe lines – 2 photoresist developer lines (spray or puddle) – Spray-coating option – Resists: AZ 1512 HS, AZ 10XT-60, LOR 5AOEMモデルの説明
Automated resist processing system providing high-throughput performance and supporting wafers up to 300 mm in diameterドキュメント
ドキュメントなし