説明
210x190x200 1,300.00 Kg構成
Power Supply: 3 phase, 380 V, 7 A, 60 Hz Heaters: 7 heaters HDMS: (Not explicitly stated – needs confirmation) Resists: 2 resists The machine has two chambers. Whether it can perform development depends on the chemical process. Since this machine currently uses PR photoresist, it only has coating functionality. If used for PI processes, it can perform both coating and development simultaneously. Coaters / Coolers: 2 coater modules. The machine had 3 cool plates and 8 storage in the machine. Tanks: Uses 4 different tanks; equipped with more than 6 flow meters (top side/back side / pre-wet / EBR / cover flow) Wafer Size: Processes 8-inch wafers onlyOEMモデルの説明
The SUSS ACS200 Gen3 platform is the successful result of a perfect mix of innovative and production proven components. With the capability of up to 4 wet process modules and a maximum of 19 plates it perfectly suits the needs of high volume manufacturing (HVM). The unmatched configuration flexibility of modules and technologies covers not only the requirements of the Advanced Packaging, MEMS and LED market it also bridges the gap between R&D and HVM.ドキュメント
ドキュメントなし
カテゴリ
Coaters & Developers
最終検証： 9日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
136190
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
SUSS MicroTec / KARL SUSS
ACS200 Gen3
カテゴリ
Coaters & Developers
最終検証： 9日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
136190
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
210x190x200 1,300.00 Kg構成
Power Supply: 3 phase, 380 V, 7 A, 60 Hz Heaters: 7 heaters HDMS: (Not explicitly stated – needs confirmation) Resists: 2 resists The machine has two chambers. Whether it can perform development depends on the chemical process. Since this machine currently uses PR photoresist, it only has coating functionality. If used for PI processes, it can perform both coating and development simultaneously. Coaters / Coolers: 2 coater modules. The machine had 3 cool plates and 8 storage in the machine. Tanks: Uses 4 different tanks; equipped with more than 6 flow meters (top side/back side / pre-wet / EBR / cover flow) Wafer Size: Processes 8-inch wafers onlyOEMモデルの説明
The SUSS ACS200 Gen3 platform is the successful result of a perfect mix of innovative and production proven components. With the capability of up to 4 wet process modules and a maximum of 19 plates it perfectly suits the needs of high volume manufacturing (HVM). The unmatched configuration flexibility of modules and technologies covers not only the requirements of the Advanced Packaging, MEMS and LED market it also bridges the gap between R&D and HVM.ドキュメント
ドキュメントなし