説明
説明なし構成
- Stand alone spin coater module with Hotplate - For wafers up to 6" (150mm) or substrates up to 4" x 4" (100mm x 100mm) - Spinner module - 19" controller - Operator panel with display - Stainless steel cabinet - Process bowl made of polypropylene - Waste bottle with full sensor - Chuck indexing. - Gyrset closed cover coating technology - Delta 150 Hotplate with 2 - 6" lift pin setup - Power: 400 VAC 50/60Hz - Brushless servomotor with resolver - Max. Speed: - with Gyrset 8”: 3000 rpm - with Gyrset 5": 4000 rpm - with Gyrset 3": 5000 rpm - with Open Bowl option: 7000 rpm depending on substrate size and load - Acceleration: 1 up to 5.000 rpm / s - Spinning Time: 0,1 up to 999 s - Dimensions: 1200 x 642 x 1317mm (W x D x H) - 3 Phase Transformer - Fix Mounted GYRSET - Programmable Electronic Dispensing Arm - Pneumatic Mini Cartridge Dispense System - Programmable Edge Bead Remover - Nozzle Programmable Puddle Nozzle - Operations Manual and documentationOEMモデルの説明
Voltage: 400 VAC / 50 Hz / 16 A Compressed air: 5 - 6 bar / tube OD 8 mm Vacuum: min. - 0.7 bar / tube OD 8 mm Nitrogen: 4.5 bar / tube OD 8 mm Exhaust: OD 100 mm (3x)ドキュメント
ドキュメントなし
SUSS MicroTec / KARL SUSS
DELTA 80 T2
検証済み
カテゴリ
Coaters & Developers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
75399
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SUSS MicroTec / KARL SUSS
DELTA 80 T2
カテゴリ
Coaters & Developers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
75399
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
- Stand alone spin coater module with Hotplate - For wafers up to 6" (150mm) or substrates up to 4" x 4" (100mm x 100mm) - Spinner module - 19" controller - Operator panel with display - Stainless steel cabinet - Process bowl made of polypropylene - Waste bottle with full sensor - Chuck indexing. - Gyrset closed cover coating technology - Delta 150 Hotplate with 2 - 6" lift pin setup - Power: 400 VAC 50/60Hz - Brushless servomotor with resolver - Max. Speed: - with Gyrset 8”: 3000 rpm - with Gyrset 5": 4000 rpm - with Gyrset 3": 5000 rpm - with Open Bowl option: 7000 rpm depending on substrate size and load - Acceleration: 1 up to 5.000 rpm / s - Spinning Time: 0,1 up to 999 s - Dimensions: 1200 x 642 x 1317mm (W x D x H) - 3 Phase Transformer - Fix Mounted GYRSET - Programmable Electronic Dispensing Arm - Pneumatic Mini Cartridge Dispense System - Programmable Edge Bead Remover - Nozzle Programmable Puddle Nozzle - Operations Manual and documentationOEMモデルの説明
Voltage: 400 VAC / 50 Hz / 16 A Compressed air: 5 - 6 bar / tube OD 8 mm Vacuum: min. - 0.7 bar / tube OD 8 mm Nitrogen: 4.5 bar / tube OD 8 mm Exhaust: OD 100 mm (3x)ドキュメント
ドキュメントなし