説明

Reflow oven (including flux system) Description Supplier Model Product Set up Date Damage or Shortage of parts Rudolph 2D NSX-115 (BBHM16) from ATT RUDOLPH NSX-115 BUMP 31/08/2016 Robot, Stage Assembly、Odyssey Board、 computer assy、power supply assy ABHM03 Inspection machine August NSX-105 BUMP 19/08/2004 Stage X Axis Motor、Odyssey Board power supply assy BOVN09 Oven SHINY HCL-A2-T3NC BUMP 14/12/2009 HEPA、over-heater controller、O2 meter、 center monitor connector Oven_BOVN08 SHINY HCLO-A2-T3NC BUMP 31/03/2010 Chamber damage、over-heater controller、 main power breaker、O2 meter Oven_BOVN07 SHINY HCLO-A2-T3NC BUMP 01/11/2007 HEPA、XP30、over-heater controller、O2 meter、N2 flow meter、 center monitor connector AFUR02_Reflow oven (including flux system) SIKAMA FALCON ICS412 BUMP 01/02/2001 Load-port、Unload-port、Coating module, Load buffer, chain and sweep-bar, controller board, flux system ADES02_8" Descum MATRIX 1177 BUMP 25/09/2004 IH600 *2 8" Coater(SUSS ACS 200)(ACOA02) SUSS ACS200 BUMP 30/10/2001 cybor pump and controller 8" Microscope #11 (AOMI11) Nikon NWL-860 BUMP 31/03/2008 Feed arm , Change arm*2 , Micro stage , macro stage motor , Change arm motor Elevator assy ,Control board , laser borad 12" Flux cleaning #1 (BFLC01) SSEC M2334 BUMP 16/10/2003 Only Casing 8"/12" Probe station #1 (BPBS01) Suss PA300 BUMP 31/10/2004 controller、control keyboard and joystick、needle support set, camera 8"/12" Auto Ball Mount #1 (BMBM01) Shibuya SBM380 BUMP 01/08/2007 Loadport、Computer、pre-aligner、 Robot BEBR01_Wafer edge cleaning machine(8\12) CW-100 DANTAI CW-100 BUMP 15/12/2006 controller board、Loadport spin motor、computer、robot Wafer defect inspection machine(AOI) (T5-ABHM04) Rudolph NSX-105 BUMP 30/04/2005 Only Casing ACS200 Type Coater tool (ACOA01) T5-ACOA01 Photoresist coating machine(SUSS ACS 200) SUSS ACS200 BUMP 30/10/2001 Robot、Pre-aligner、Loadport spin chuck、Hot plate、computer、 cybor pump