説明
Clean Track Lithius Pro - Coater / Developer構成
Details Attached Main Configuration: Carrier Station (Loader) Process Block (Coater/Developer Cups) COT Cabinet (Coater Chemical Cabinet) DEV Cabinet (Developer Chemical Cabinet) Dev Cabinet Coater (QTY 6) Developer (QTY 9)OEMモデルの説明
The CLEAN TRACK™ LITHIUS Pro™ is a state-of-the-art 300mm process coater/developer that offers enhanced productivity and a significantly decreased footprint. It supports advanced immersion lithography through its innovative modules and integrated metrology, providing advanced process control solutions. Additionally, this platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership), making it a cost-effective and efficient solution for your lithography needs.ドキュメント
カテゴリ
Coaters & Developers
最終検証： 3日前
主なアイテムの詳細
状態：
Parts Tool
稼働ステータス:
Deinstalled
製品ID：
155171
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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すべて表示
TEL / TOKYO ELECTRON
LITHIUS Pro
カテゴリ
Coaters & Developers
最終検証： 3日前
主なアイテムの詳細
状態：
Parts Tool
稼働ステータス:
Deinstalled
製品ID：
155171
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available