説明
ARF IMMERSION Track構成
構成なしOEMモデルの説明
The CLEAN TRACK™ LITHIUS Pro™/LITHIUS Pro™ ｰi is a 300mm process coater/developer that offers enhanced productivity and a significantly decreased footprint. It supports advanced immersion lithography through innovative modules and integrated metrology for advanced process control solutions. This platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership). In summary, the CLEAN TRACK™ LITHIUS Pro™/LITHIUS Pro™ ｰi is a highly efficient and cost-effective solution for advanced immersion lithography.ドキュメント
ドキュメントなし
カテゴリ
Coaters & Developers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
127969
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
TEL / TOKYO ELECTRON
LITHIUS Pro-i
カテゴリ
Coaters & Developers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
127969
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
ARF IMMERSION Track構成
構成なしOEMモデルの説明
The CLEAN TRACK™ LITHIUS Pro™/LITHIUS Pro™ ｰi is a 300mm process coater/developer that offers enhanced productivity and a significantly decreased footprint. It supports advanced immersion lithography through innovative modules and integrated metrology for advanced process control solutions. This platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership). In summary, the CLEAN TRACK™ LITHIUS Pro™/LITHIUS Pro™ ｰi is a highly efficient and cost-effective solution for advanced immersion lithography.ドキュメント
ドキュメントなし