説明
Cluster tool tracks (resist coater/developer)構成
構成なしOEMモデルの説明
The CLEAN TRACK™ ACT™ 12 SOD is spin-on dielectric systems designed to coat, bake, and cure of low-k dielectric materials. Its innovative process modules provides optimally process for organic, inorganic, hybrid, and porous materials. In addition, CLEAN TRACK™ ACT™ 12 SOD equipped in-line curing, which had been traditionally performed in a furnace, by incorporation of high temperature hotplate processing in a low-oxygen environment.ドキュメント
ドキュメントなし
TEL / TOKYO ELECTRON
ACT 12 SOD
検証済み
カテゴリ
Coaters & Developers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
105921
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / TOKYO ELECTRON
ACT 12 SOD
カテゴリ
Coaters & Developers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
105921
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Cluster tool tracks (resist coater/developer)構成
構成なしOEMモデルの説明
The CLEAN TRACK™ ACT™ 12 SOD is spin-on dielectric systems designed to coat, bake, and cure of low-k dielectric materials. Its innovative process modules provides optimally process for organic, inorganic, hybrid, and porous materials. In addition, CLEAN TRACK™ ACT™ 12 SOD equipped in-line curing, which had been traditionally performed in a furnace, by incorporation of high temperature hotplate processing in a low-oxygen environment.ドキュメント
ドキュメントなし