説明
DEPO構成
構成なしOEMモデルの説明
Continuous High Throughput APCVD for 6 inch or below. High volume production continuous APCVD to meet with user's need to process 120WPM for 6 inch and smaller wafers. Developed wider area deposition dispersion head dedicated to A6300S and minimize the number of trays to reduce the cost of system. SiC Trays as susceptors prevent heavy metal addition and help long term stable process for long term production. Good maintainability and Operators safety are given by automated head base lifting system and automated tray exchange system, that shorten PM time for longer use of systemドキュメント
ドキュメントなし
AMAYA
A6300S
カテゴリ
CVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
123634
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
DEPO構成
構成なしOEMモデルの説明
Continuous High Throughput APCVD for 6 inch or below. High volume production continuous APCVD to meet with user's need to process 120WPM for 6 inch and smaller wafers. Developed wider area deposition dispersion head dedicated to A6300S and minimize the number of trays to reduce the cost of system. SiC Trays as susceptors prevent heavy metal addition and help long term stable process for long term production. Good maintainability and Operators safety are given by automated head base lifting system and automated tray exchange system, that shorten PM time for longer use of systemドキュメント
ドキュメントなし