説明
説明なし構成
CTS10U- Microwave Power Enhanced CVD Diamond Production Platform. Includes most recent advances in CVD diamond manufacturing technology including 10KW plasma source providing 50% more throughput than 6KW systems. Substrate stage: -200mm water cooled stage configured between the hot plasma and a small quartz microwave window for superior diamond purity and wide operational regime. 66mm diameter proven diamond deposition diameter. -Computer controlled motorized stage positioning system is included. Software automatically adjusts stage height providing over 10mm travel to accommodate large seed growth at optimum temperature. Chamber: -Double wall water cooled chamber ensures uniform cooling at full microwave power operation. -Clamshell lid designed for fast turn-around, easy access and fast loading/unloading. -Unique differentially pumped double O-ring consistently seals chamber for high diamond purity and reproducible results. -Three UHV Conflat Flange sealed windows provide clear wide leak free views of growing diamonds and includes top window for line of sight fiberoptic infra red pyrometry and two side windows for plasma observation. All UHV windows sealed with CF copper gasket. Process Control Features: -Wired/wireless remote monitoring -includes 3G/4G cellular phone/web remote process control, remote process monitoring, remote service support and remote software upgrades. -Four gas channels controlled with MKS Instruments precision mass flow controllers are provided. (OPTIONAL 2 additional Gas channels). -Integrated Dual wavelength IR pyrometer for remote diamond temperature measurement and feedback loop control of temperature. User can select using plasma power, stage position and/or pressure to control deposition temperature. Each control mode is provided with user tunable PID parameters. -Pressure control via feedback loop valve with user tunable PID parameters. -OPTO-PAC software environment with optically isolated I/O controllers for maximal reliability and longevity. -Windows 10 S/W with GUI screens for system status, auto and manual process modes, safety interlocks, and continuous graphical data logging of 16 process parameters and alarms logs. Software resides in system internal hardware and runs independently of Microsoft Windows status. Microwave Power Supply: -CTS10U is factory equipped with circulator, dummy load, and 3 stub tuner for magnetron longevity. For flexibility and independence from microwave power supply providers CTS10U is can control MKS Instruments and Muegge 10KW, Sairem and Muegge 6KW units. This unit will be provided with MKS Instruments 10KW PS.OEMモデルの説明
CTS10U is world class Microwave (MW) Plasma CVD system designed to manufacture highest quality man made diamond products capable of up to 10KW plasma power. 200mm water cooled stage configured between the hot plasma and a small quartz microwave window for superior diamond purity and wide operational regime. 66mm diameter proven diamond deposition diameter. Computer controlled motorized stage positioning system is included. Software automatically adjusts stage height providing over 10mm travel to accommodate large seed growth at optimum temperature.ドキュメント
ドキュメントなし
CARAT SYSTEMS
CTS10U
検証済み
カテゴリ
CVD
最終検証： 18日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
60445
ウェーハサイズ：
不明
ヴィンテージ：
2021
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CARAT SYSTEMS
CTS10U
カテゴリ
CVD
最終検証： 18日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
60445
ウェーハサイズ：
不明
ヴィンテージ：
2021
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
CTS10U- Microwave Power Enhanced CVD Diamond Production Platform. Includes most recent advances in CVD diamond manufacturing technology including 10KW plasma source providing 50% more throughput than 6KW systems. Substrate stage: -200mm water cooled stage configured between the hot plasma and a small quartz microwave window for superior diamond purity and wide operational regime. 66mm diameter proven diamond deposition diameter. -Computer controlled motorized stage positioning system is included. Software automatically adjusts stage height providing over 10mm travel to accommodate large seed growth at optimum temperature. Chamber: -Double wall water cooled chamber ensures uniform cooling at full microwave power operation. -Clamshell lid designed for fast turn-around, easy access and fast loading/unloading. -Unique differentially pumped double O-ring consistently seals chamber for high diamond purity and reproducible results. -Three UHV Conflat Flange sealed windows provide clear wide leak free views of growing diamonds and includes top window for line of sight fiberoptic infra red pyrometry and two side windows for plasma observation. All UHV windows sealed with CF copper gasket. Process Control Features: -Wired/wireless remote monitoring -includes 3G/4G cellular phone/web remote process control, remote process monitoring, remote service support and remote software upgrades. -Four gas channels controlled with MKS Instruments precision mass flow controllers are provided. (OPTIONAL 2 additional Gas channels). -Integrated Dual wavelength IR pyrometer for remote diamond temperature measurement and feedback loop control of temperature. User can select using plasma power, stage position and/or pressure to control deposition temperature. Each control mode is provided with user tunable PID parameters. -Pressure control via feedback loop valve with user tunable PID parameters. -OPTO-PAC software environment with optically isolated I/O controllers for maximal reliability and longevity. -Windows 10 S/W with GUI screens for system status, auto and manual process modes, safety interlocks, and continuous graphical data logging of 16 process parameters and alarms logs. Software resides in system internal hardware and runs independently of Microsoft Windows status. Microwave Power Supply: -CTS10U is factory equipped with circulator, dummy load, and 3 stub tuner for magnetron longevity. For flexibility and independence from microwave power supply providers CTS10U is can control MKS Instruments and Muegge 10KW, Sairem and Muegge 6KW units. This unit will be provided with MKS Instruments 10KW PS.OEMモデルの説明
CTS10U is world class Microwave (MW) Plasma CVD system designed to manufacture highest quality man made diamond products capable of up to 10KW plasma power. 200mm water cooled stage configured between the hot plasma and a small quartz microwave window for superior diamond purity and wide operational regime. 66mm diameter proven diamond deposition diameter. Computer controlled motorized stage positioning system is included. Software automatically adjusts stage height providing over 10mm travel to accommodate large seed growth at optimum temperature.ドキュメント
ドキュメントなし