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説明
-System is powered by Inova pvd e-chuck power supply. -Brooks automation magnatran 7 -2 sets of cti cryocenics -VAT vacuum valves -PVD CU and PVD TA for wafers構成
-Cu, TA , Etcher -Missing pumpOEMモデルの説明
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.ドキュメント
ドキュメントなし
カテゴリ
CVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
66181
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
カテゴリ
CVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
66181
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
-System is powered by Inova pvd e-chuck power supply. -Brooks automation magnatran 7 -2 sets of cti cryocenics -VAT vacuum valves -PVD CU and PVD TA for wafers構成
-Cu, TA , Etcher -Missing pumpOEMモデルの説明
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.ドキュメント
ドキュメントなし