COMPLUS
概要(Overview)
Applied ComPlus-EV Inspection is the industry's only patterned wafer inspection system that performs high-speed inspection of all darkfield and key brightfield applications for 90nm production. Using proprietary Enlarged GrayField technology, this single-system solution detects a broad range of defect types at production throughput, enabling faster ramp and higher production yield.
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検査、保証、鑑定、ロジスティクス