説明

Automated optical inspection machine

構成

Item # Part Number Description EagleT-I (2D only) PR1096500 Automated optical inspection machine Supports wafer size up to 12” for 2D inspection & metrology New 2D Optics and Camera Windows 10 operating system Die editing software SPC – Yield maps, histograms and analysis for die level / wafer level / lot level (online and offline) Magnifications – Four out of x1.2, x2, x2.8, x3.5, x5, x7.5, x10 & x20 Color review camera CE, SEMI, ISO – conformity Inspection Optics First Magnification (x3.5) PR2034205 Provides ~ 2.4 micron resolution Second Magnification (x5) PR2103700 Provides ~ 1.7 micron resolution Third Magnification (x10) PR2103800 Provides ~ 0.85 micron resolution Fourth Magnification (x2.8) PR2141600 Provides ~ 3.0 micron resolution Verification Optics Dual Mag Verification PR2148800 Multi-Mag. verification X2 Lens for Dual verification PR2103900 X2 Lens for Dual verification X10 Lens for Dual verification PR2119300 X10 Lens for Dual verification FFU (HEPA Filter) Fan Filter Unit (FFU) PR2019900 Enables ISO class 2 mini environment Software Package Software Package PR2117200 Camtek software package for 2D inspection and metrology Includes: Surface inspection algorithms Street inspection algorithms Kerf monitoring algorithms 2D metrology algorithms New Genesis algorithms Basic SPC package Multi recipe option Multi project/index option DRE & SRD Wafer maps Existing wafer map format PR2035900SW SINGLE WAFER MAP LICENSE New wafer map format Request PR2035902SW New wafer map format or KLARF Computers Processing PCs PR2117600 Powerful 56 cores computers for demanding applications Certified Items Certified 2D performance target PR2037500 Certified 2D performance target for Eagle LCC targets PR2194800 Tool matching LCC target Special Chinese labels PR2119500 Chinese labels for Eagle License dongle PR2106500 License dongle for clean reference Diffusive Ring Diffusive Ring PR2168600 KB-RETRACTBLE WDR FOR INSPECTION Wide Diffusive Ring Fibers PR2168700 KB-WDR 42 Inspection Illumination INSPECTION ILLUMINATION PR2168900 KB-2ND XENON SOURCE FOR DF INSPECTION ILLUMINATION PR2169000 KB- XENON LIGHT (EAGLE T) Automation Dual Arm Camtek AL2 PR2129300 Auto loader with dual arm for bare and framed wafers 300mm porous chuck PR2099800 Porous chuck for bare/framed wafers 8" & 12” CHUCK ADAPTOR 8'' GLASS ADAPTOR PR2212600 PRS - 8'' GLASS ADAPTOR (WL GORE) Load Ports UNIVERSAL 8/12" PD/BARE PR2157400 QUICK REPLACEMENT UNIVERSAL PLATE FOR CAL 2 - SUPPORTS 8" & 12" BARE AND FRAMED WAFERS PLATE - LEFT UNIVERSAL 8/12" PD/BARE PR2157400 QUICK REPLACEMENT UNIVERSAL PLATE FOR CAL 2 - SUPPORTS 8" & 12" BARE AND FRAMED WAFERS PLATE - Right End Effectors 8'' Disco end effector PR2140100 Fast exchange end effector for 8" framed wafers Barcode Reader Manual barcode reader PR2031900 Automatically reads the barcode of a Cassette ID / Lot ID / Data on Traveler QR CODE reader PR2175700 PRS - BCR DM150Q FOR QR (CAL2) Ionizers and Particles removal Keyence ionizers PR2101600 Ionizer to reduce ESD inside the inspection tool Particles Blower – WDR DF PR2154000 Removes particles from inspection area, reduces verification time and increases machine utilization. SECS GEM Special Options Off-line station (2 sets) PR2135300 Allows setup, review and re-classification of scan results offline. Second Super Comp. PR2157700 Second 56 cores super processing computer

OEMモデルの説明

Designed for speed and accuracy, Camtek’s Eagleᵀ-i is one of the fastest and most accurate 2D inspection tools in the market. The system provides leading 2D inspection capabilities powered by: Genesis detection engine New camera New high-end optic channel Special LED illumination CAD based detection Cutting edge processing power Eagleᵀ-i provides advanced solutions for Fan-out applications: Down to 2um RDL inspection Panel handling Warped wafer handling